CMOS Micromechanical Resonator Oscillator
نویسنده
چکیده
A completely monolithic high-Q oscillator, fabricated via a combined CMOS plus surface micromachining technology, is described, for which the oscillation frequency is controlled by a polysilicon micromechanical resonator to achieve stability and phase noise performance comparable to those of quartz crystal oscillators. It is shown that the closed-loop, steady-state oscillation amplitude of this oscillator can be controlled through the dc-bias voltage applied to the capacitively driven and sensed μresonator. Measurements indicate a phase noise density level of -168 dBm/Hz at 5 kHz offset frequency for an oscillator carrier power of -14.5 dBm.
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An Integrated CMOS Micromechanical Resonator High- Oscillator
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